ƒEƒGƒnŒŸ¸‘•’u
Ž©“®Œ‹»Œ‡Š×ŒŸ¸‘•’u
‚Q‚O‚P‚V”N‚UŒŽ‚Q‚T“úXV

“ú–{ƒZƒ~ƒ‰ƒ{(Š”) Œ‹»ŒˆŽZ•ªÍ‘•’u
“ú–{
ƒJƒUƒ}ƒGƒ“ƒWƒjƒAƒŠƒ“ƒO(Š”) ƒ‰ƒbƒsƒ“ƒOƒEƒGƒn[ŠOŠÏŒŸ¸‘•’u
(Š”)ƒRƒxƒ‹ƒR‰ÈŒ¤ –‚‹¾ƒVƒXƒeƒ€New
(Š”)ƒRƒxƒ‹ƒR‰ÈŒ¤LEOŽ–‹Æ–{•”
(Š”)“ú—§ƒnƒCƒeƒNƒmƒƒW[ƒY ƒ~ƒ‰[“dŽqŽ®ŒŸ¸‘•’u
(Š”)ƒ~ƒEƒ‰ ƒEƒGƒn[’[–ʈꊇŒŸ¸‘•’u
ŽR‰º“d‘•(Š”) •\–ÊŒŸ¸‘•’u
ŠCŠO
KLA-Tencor Optical Surface Analyzer
ƒP[ƒGƒ‹ƒG[Eƒeƒ“ƒR[ƒ‹(Š”)
Semilab Co., Ltd. Œ‹»ŒˆŽZ•ªÍ‘•’u
“ú–{ƒZƒ~ƒ‰ƒ{(Š”)

@@@@
‚²ˆÓŒ©E˜A—@@TOPƒy[ƒWƒw@@‘O‚̃y[ƒW‚Ö
 

2001”N1ŒŽ22“ú§’è