SEMI プレスリリース

2003年6月28日更新
INDEX
2003.6.28 SEMICON Taiwan to be Held as Scheduled, September 15-17New
2003.6.25 SEMI FORUM JAPAN 2003 本日開幕
2003.6.25 MEMS Breaks Out at SEMICON West 2003
2003.6.18 North American Semiconductor Equipment Industry Posts May 2003
Book-to-Bill Ration of 0.89
2003.6.17 SEMICON West 2003 Features Fab Managers Forum on July 17
Full Day Seminar Hosted by SEMI, International SEMATECH and the SIA
2003.6.17 「グローバルスタンダードへの挑戦」刊行のお知らせ
2003.6.10 SEMICON West 2003 Opens July 14 with Technology Innovation Showcase
2003.6.5 SEMI Publishes 13 New Standards Related to Semiconductor, FPD Manufacturing
Common Specifications Contribute to Lower Costs, Faster Time to Market
2003.5.21 SEMICON West 2003 Set for July 14-18 in San Francisco and San Jose
2003.5.16 North American Semiconductor Equipment Industry Posts April 2003
Book-to-Bill Ratio of 0.86
2003.5.10 SEMICON Singapore 2003 Cancelled
2003.5.8 SEMI、2003年第1四半期のシリコンウェーハ出荷面積を発表前四半期より増加
2003.5.6 「SEMI FORUM JAPAN 2003」6月24日(火)〜26日(木)、グランキューブ大阪にて開催
2003.4.22 「SEMI FPD Expo 2003」 成功裡に閉幕
2003.4.5 「EDF 電子ディスプレイ・フォーラム 2003」間もなく開催
2003.3.22 North American Semiconductor Equipment Industry Posts February 2003
Book-to-Bill Ratio of 0.99
2003.3.12 SEMICON Europa 2003 Programs Focus on Advances in IC Manufacturing
2003.3.5 SEMICON Singapore Returns to Suntec Centre 6-8 May
2003.3.5 SEMI FPD Expo 2003 Scheduled for April 9-11 in Tokyo
2003.2.28 2003年 井上 晧 EHS賞の候補者推薦受付を開始
2003.2.21 EDF 電子ディスプレイ・フォーラム 2003」開催
49日(水)〜11日(金)、東京ビッグサイト 会議棟にて
2003.2.21 21世紀を切り開く ディスプレイ新製造技術展「SEMI FPD Expo 2003」
4月9日(水)〜11日(金)、東京ビッグサイトで開催
2003.2.19 North American Semiconductor Equipment Industry Posts January 2003
Book-to-Bill Ratio of 0.92
2003.2.19 SEMI、2002年第4四半期のシリコンウェーハ出荷面積を発表
2003.2.3 SEMICON Europa Return to Munich April 1-3, 2003
2003.1.25 North American Semiconductor Equipment Industry Posts December 2002
Book-to-Bill Ratio of 0.98
2003.1.18 Yee-Ming Ting Named President, SEMI China
2003.1.7 Fourth-Annual Bob Graham Award Presented to Shigeru "Steve" Nakayama

SEMICON Taiwan to be Held as Scheduled, September 15-17

TAIPEI, Taiwan, June 25, 2003 -- SEMI- today announced its plans to hold the SEMICON
Taiwan 2003 exposition as scheduled, September 15-17, 2003, at the Taipei World Trade
Center in Taipei, Taiwan. SEMICON Taiwan is organized by SEMI, co-sponsored by the China
External Trade Development Council (CETRA), and endorsed by the Taiwan Semiconductor
Industry Association (TSIA).

SEMICON Taiwan is the largest exposition dedicated to microelectronics manufacturing in
Taiwan. To date, more than 330 companies occupying more than 9,800 square meters of
exhibit space are scheduled to take part in this year's event. Last year, SEMICON Taiwan
attracted more than 22,000 visitors.

"Taiwan is a critical market for microelectronics manufacturing and as the global industry looks
to recover from three years of downturn, we believe SEMICON Taiwan presents a great
opportunity for industry to get back to business," said George Lin, president of SEMI
Southeast Asia.

In 2002, Taiwan was one of the few highlights for the global semiconducto industry.
Spending on capital equipment grew modestly--nine percent--to $3.5 billion, making Taiwan
the world's third largest market for semiconductor equipment. In comparison, worldwide
spending on capital equipment declined 30 percent last year to $19.7 billion.

Online visitor registration will be available beginning in mid-July. For more information
regarding SEMICON Taiwan 2003, visit www.semi.org/semicontaiwan.

SEMI is a global industry association serving more than 2,500 companies that develop and
provide manufacturing technology and materials to the global semiconductor, flat panel
display, MEMS and related microelectronics industries. SEMI maintains offices in Austin,
Beijing, Brussels, Hsinchu, Moscow, San Jose (Calif.), Seoul, Shanghai, Singapore, Tokyo and
Washington, D.C. For more information, visit www.semi.org.

ASSOCIATION CONTACTS: 
Michael Droeger/SEMI
Tel: 1.408.943.6953
E-mail: mdroeger@semi.org
Irene Yu/SEMI Taiwan
Tel: 866.3.573.3399
E-mail: iyu@semi.org

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SEMI FORUM JAPAN 2003 本日開幕
(グランキューブ大阪にて、26日(木)まで開催)
基調講演会に 松下電器 古池 登壇
「半導体は、Integrated Solution Company (ISC) の時代」

本日624日(火)、SEMISemiconductor Equipment and Materials International)主催の「SEMI FORUM JAPAN
2003
」が、大阪市のグランキューブ大阪(大阪国際会議場)にて開幕いたしました。

SEMI FORUM JAPAN は、システム、デバイス、装置、材料など半導体バリューシステムを包括するセミナー主体のイベント
で、今年で第
3回目を迎えました。20026月に開催された第2 SEMI FORUM JAPANには、27のプログラムおよび
37
のスタンタード関連会議に業界関係者のべ2,326名が参加しました。
本年も“IT System & ULSI Technology”をテーマに、624日(火)〜26日(木)の3日間で26プログラムおよび
スタンダード関連会議が開かれます。日本半導体ベンチャー協会(
JASVA)、SSIS半導体シニア協会、応用物理学会、
関西半導体解析技術研究会、半導体業界ソフトウェア供給会社交流会(
VANS)よりも協賛・協力を受け、これら各団体
主催のプログラムも開催されます。本年は、
3日間でのべ約2,500名の参加が見込まれています。

今回のSEMI FORUM JAPAN では、ビジネスとしても拡大が期待されるSoC (System on Chip)/システムLSI分野に
焦点をあて、日本の半導体事業戦略のあるべき姿を考えていきます。


本日950分より開催された「SEMI/JASVA基調講演会」では、松下電器産業株式会社 代表取締役常務半導体社社長
古池
氏が「ディジタルコンシューマー時代のシステムLSI戦略」と題して、講演を行いました。古池氏は同講演において、
「セットの市場を確保するものが半導体のメインプレーヤーとなり、
21世紀にはネットでつながるディジタルコンシューマー
機器が大きな市場を獲得する可能性がある。即ち、システム
LSIの時代が来ている、と言えよう。」、「21世紀の半導体
ソリューションビジネスこそが“システム
LSI”であり、松下のシステムLSI事業は、ディジタルコンシューマーに事業領域を
集中して、知恵の差別化と時間軸競争を重視し、デファクト形成による多面的回収
-Integrated Solution-により事業を成立
させる戦略をとる。」と述べました。
また、松下におけるシステムLSIの例として、「世界初のディジタルTV1チップバック
エンド
LSI」や「DVDプレーヤ用1チップLSI」をあげて紹介されました。
さらに、システムLSIの生産については、「ファブレス、ファウンダリとIDM (Integrated Device Manufacturer) の関係に
ついては、微細化の進行により設計とプロセスのマージンが小さくなるため、これまでのようなファブレス+ファウンダリによる
生産は難しくなる。」との見通しを述べました。最後に、「
Integrated Solution Company (ISC) は美しいビジネスモデルで
あるが、現実には幾多の困難が横たわっており、半導体装置・材料業界とデバイスメーカーが一体となった技術革新こそが、
半導体産業成長の源泉である。」とまとめました。

SEMI/JASVA基調講演会では、株式会社先端SoC基盤技術開発(ASPLA) 代表取締役社長兼CEO 川手 啓一 氏も
ASPLA プラットフォーム −ファブレスベンチャーとIDMの協業環境として−」と題して講演を行いました。

また、本日午後は、「SEMI FORUM JAPAN エグゼクティブシンポジウム」パネル討論に、パネリストとして、ドイツ証券
東京支店株式調査部・マネージングディレクター/株式調査部長
佐藤 文昭 氏、株式会社リコー 電子デバイスカンパニー
デピュティプレジデント
中山 春夫 氏、エルピーダメモリ株式会社 代表取締役社長兼CEO 坂本 幸雄 氏、株式会社
ルネサステクノロジ
代表取締役 取締役社長&COO 伊藤 氏、経済産業省 商務情報政策局情報通信機器課 課長
福田
秀敬 氏が参加され、“事業再編を踏まえた日本半導体ビジネスの行方”をテーマに議論を展開する予定です。

SEMI FORUM JAPAN 2003では、明日25日(水)および翌26日(木)も、「第5回マイクロマシンセミナー」をはじめとする
技術セミナー、「
IC Tutorialセミナー」、「SEMIマーケットセミナー」、スタンダード関連会議など、多彩なプログラムが予定
されています。


SEMI FORUM JAPAN 2003 各プログラムの詳細は、Webサイトでご案内しています。
URLhttp://www.semi.org/sfj2003
また、SEMI FORUM JAPAN 2003に関するお問い合わせは、SEMIジャパン マーケティング部(Tel: 03-3222-5993
E-Mail: jeventinfo@semi.org)でお受けしています。

SEMI FORUM JAPAN 2003 の各プログラムは、席に余裕のある限り、会場での当日受付も承っています。皆様のご参加を
お待ちしております。


SEMI FORUM JAPAN 2003 開催概要

●会期:2003624()26()  3日間
●会場:グランキューブ大阪(大阪国際会議場)
●主催:SEMI (Semiconductor Equipment and Materials International)
●協賛:日本半導体ベンチャー協会(JASVA)SSIS半導体シニア協会
●聴講:有料 ※一部無料講演あり
WEBサイト:http://www.semi.org/sfj2003

●プログラム概要:
624日(火)
SEMI/JASVA基調講演会
「ディジタルコンシューマー時代のシステムLSI戦略」
松下電器産業() 代表取締役常務半導体社社長 古池
「ファブレスベンチャーとIDMの協業環境としてのASPLAプラットフォーム」
()先端SoC基盤技術開発(ASPLA)代表取締役社長兼CEO 川手 啓一
SEMI FORUM JAPANエグゼクティブシンポジウム
−事業再編を踏まえた日本半導体ビジネスの行方−
JASVA Day OSAKA
−新世代アプリにかけるニッポンファブレスベンチャー群像−
日本のEHS法規制説明会
応用物理学会シリコンテクノロジー分科会 研究集会 ―接合技術ワークショップ−
High Pressure Workshop
−クリーンルーム内での高圧ガス利用に関する安全性ワークショップ−
IC Tutorialセミナー  リソグラフィコース/拡散・注入コース
SEMI FORUM JAPANフレンドシップパーティ
625日(水)
SSIS半導体シニア協会特別シンポジウム
エッチング技術セミナー  −最先端多層配線のためのエッチング技術−
多層配線技術セミナー(1)  −インテグレーションと信頼性を中心として−
フロントエンドプロセスセミナー  −最先端フロントエンドプロセスの課題と願望−
微細化のブレイクスルーセミナー  −65nm以降の時代を拓く微細化技術−
5回マイクロマシンセミナー  ― 走り出したMEMS産業
応用物理学会関西支部主催セミナー  −これからの不揮発性メモリ技術とその展望−
IC Tutorialセミナー  多層配線コース/エッチングコース
SEMIスタンダード会議
SFJスクランブルカフェ
626日(木)
多層配線技術セミナー(2)  −Low-kのプロセスソリューション−
プロセス・デバイス技術セミナー  −ユビキタス機器向LSIとデバイス技術課題−
マニュファクチャリングサイエンスセミナー  −日本半導体復活の鍵SiP
Risk Assessment Workshop
VANSセミナー  −APCの実例−
5回関西半導体解析技術研究会  −加速する微細化と解析技術−
SEMIマーケットセミナー
SEMIスタンダード会議
SFJスクランブルカフェ

・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・
SEMISemiconductor Equipment and Materials International
SEMIは、半導体およびフラットパネルディスプレイ(FPD)関連製造装置・材料産業の国際的な工業会組織として、業界の
健全な発展と国際協調を願って多岐にわたる活動を行っています。現在、オースティン、サンノゼ、上海、シンガポール、
新竹、ソウル、東京、ブリュッセル、北京、モスクワ、ワシントン
DCにオフィスがあり、会員企業は約2,500社、この内日本
企業は約
580社にのぼります。
SEMI本部:
 3081 Zanker Road, San Jose, CA 95134-2127, U.S.A.
Tel:+1-408-943-6900, Fax:+1-408-428-9600, E-mail:semihq@semi.org, URL:www.semi.org
SEMI日本事務所:SEMIジャパン  代表 内田 傳之助
 〒102-0074 東京都千代田区九段南4-7-15 健和ビル7F
 Tel:03-3222-5755, Fax:03-3222-5757, E-mail:semijapan@semi.org, URL:www.semi.org/japan

本リリースへのお問合せ
■メディア・コンタクト
  SEMIジャパン マーケティング部
  E-Mail:jpress@semi.org
  Tel: 03-3222-6020、 Fax:03-3222-5757
■SEMI FORUM JAPANについて
  SEMIジャパン マーケティング部
  E-Mail:jeventinfo@semi.org
  Tel:03-3222-5993、Fax:03-3222-5790

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MEMS Breaks Out at SEMICON West 2003
New Committee to Guide Global Efforts of MEMS Steering Group


SAN JOSE, Calif., June 23, 2003 ‐ The world of micro-electromechanical systems (MEMS)
debuts at SEMICON West next month, with a dedicated MEMS pavilion and one-day MEMS
conference featured as part of the week-long exposition activities.

The first MEMS event at SEMICON West 2003 will be the MEMS Pavilion, open from July 14 to
16 in the Esplanade Hall of the Moscone Center, San Francisco. The pavilion will showcase the
latest technologies and tools dedicated to MEMS.

A one-day MEMS conference, with the theme Microsystems: Lessons Learned From the
Semiconductor Industry,” will be held July 16. Expert speakers will focus on topics such as the
market opportunity for MEMS, packaging and system integration issues, metrology applications,
and commercial MEMS production in a semiconductor-manufacturing environment.

“Just as silicon has become pervasive, going forward we will see MEMS devices become part of
our everyday life,” said Stanley T. Myers, president and CEO of SEMI. “Many companies in the
semiconductor industry are finding that they can leverage their manufacturing and R&D skills
and apply them to MEMS. SEMI is playing an important role in facilitating this trend.”

The 33rd annual SEMICON West opens at the Moscone Center July 14-16, and continues at
the San Jose Convention Center July 16-18. The exposition is presented by SEMI, the global
industry association for semiconductor and related microelectronics manufacturing.

The MEMS pavilion and conference are co-sponsored by the MEMS Industry Group and
MANCEF, the Micro and Nanotechnology Commercialization Education Foundation.

SEMI’s involvement in MEMS dates back to 1994 when it first conducted discussions with
European organizations involved in the emerging MEMS industry. SEMI also provided funds for the
development of the first MEMS industry roadmap, published in 2002 by MANCEF.

Earlier this year, SEMI established the International MEMS Steering Group to co-ordinate the
global MEMS activities of the association. More than 100 organizations from Europe, Asia Pacific
and North America have so far joined the IMSG. In the most recent development,
Joseph M. Brown, regional marketing director for Suss MicroTec’s MEMS business in the
Americas, was elected the first chairman of the IMSG.

The vice chairman of the IMSG executive committee is Uwe Behringer of UBC Microelectronics,
Germany. Other members of the executive committee include Martin Walker, Oxford Instruments,
UK; Prof. Masayoshi Esashi, Tohoku University, Japan; and Winthrop Baylies, BayTech Group, U.S.

“We are pleased to have leaders of the caliber of Joe Brown, along with his vice chair and
executive committee members, to oversee the activities of the IMSG,” said Bettina Weiss, IMSG
staff officer and SEMI’s manager of program development.

“Even under difficult economic conditions, MEMS continues to project double digit growth
worldwide,” said Brown. “Our vision is for the IMSG to guide the industry and share our
resources for the benefit of all.”

Based in San Jose, Calif., SEMI is an international industry association serving more than 2,500
companies participating in the semiconductor, flat panel display and MEMS equipment and
materials markets. SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, Seoul,
Shanghai, Singapore, Tokyo and Washington, D.C. For more information, visit SEMI on the
Internet at www.semi.org.


ASSOCIATION CONTACTS: 
Michael Droeger/SEMI
Tel: 1.408.943.6953
E-mail: mdroeger@semi.org
Jonathan Davis/SEMI
Tel: 1.408.943.6937
E-mail: jdavis@semi.org

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North American Semiconductor Equipment Industry Posts May 2003
Book-to-Bill Ration of 0.89


SAN JOSE, Calif., June 17, 2003 -- North American-based manufacturers of semiconductor
equipment posted $751 million in orders in May 2003 (three-month average basis) and a

book-to-bill ratio of 0.89, according to the May 2003 Express Report published today by
Semiconductor Equipment and Materials International (SEMI). A book-to-bill of 0.89 means that
$89 worth of new orders were received for every $100 of product billed for the month.

The three-month average of worldwide bookings in May 2003 was $751 million. The bookings
figure is one percent below the revised April 2003 level of $757 million and 32 percent below the
$1.11 billion in orders posted in May 2002. 

The three-month average of worldwide billings in May 2003 was $840 million. The billings figure
is even with the revised April 2003 level and 3.5 percent below the May 2002 billings level of
$870 million. 

"The outlook for front-end equipment remains sluggish, suggesting a single-digit recovery this
year, although some analysts remain hopeful for the possibility of 10-15 percent billings growth
in 2003," said Stanley Myers, president and CEO of SEMI. "Conditions are more positive for the
test, assembly and packaging segment, which continues to post modest gains and could
experience a double-digit recovery this year." 

The SEMI book-to-bill is a ratio of three-month moving average bookings to three-month moving
average billings for the North American semiconductor equipment industry. Billings and bookings
figures are in millions of U.S. dollars. 
.
Billings
(Three-month avg.)
Bookings
(Three-month avg.)
Book-to-Bill
December 2002 878.3 826.5 0.94
January 2003 784.4 739.0 0.94
February 2003 777.7 760.6 0.98
March 2003 857.1 777.3 0.91
April 2003 (final) 840.4 757.3 0.90
May 2003 (prelim.) 839.5 751.3 0.89

The data contained in this release was compiled by David Powell, Inc., an independent financial
services firm, without audit, from data submitted directly by the participants. SEMI and David
Powell, Inc. can assume no responsibility for the accuracy of the underlying data. 

The data are contained in a monthly Express Report published by SEMI that tracks billings and
orders worldwide of North American-based manufacturers of equipment used to manufacture
semiconductor devices, not billings and orders of the chips themselves. The April 2003 Express
Report is scheduled for publication on July 18, 2003 (subject to change). 

Based in San Jose, Calif., SEMI is an international industry association serving more than 2,500
companies participating in the semiconductor and flat panel display equipment and materials
markets. SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, Seoul, Shanghai,
Singapore, Tokyo and Washington, D.C.
For more information, visit SEMI on the Internet at www.semi.org.
INDUSTRY/IRCONTACT: 
  Dan Tracy/SEMI      
  Tel: 1.408.943.7987  
  E-mail: dtracy@semi.org
MEDIA CONTACT: 
 Jonathan Davis/SEMI  
 Tel: 1.408.943.6953
  E-mail: jdavis@semi.org 

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SEMICON West 2003 Features Fab Managers Forum on July 17
Full Day Seminar Hosted by SEMI, International SEMATECH and the SIA


SAN JOSE, Calif., June 16, 2003 -- The inaugural SEMICON West Fab Managers Forum --
featuring expert advice from leading device makers and equipment suppliers on strategies and
techniques for enhancing manufacturing productivity -- will be held Thursday, July 17.

The forum, which focuses on the theme “Current and Future Trends in Semiconductor
Manufacturing” is organized by SEMI and co-hosted by International SEMATECH, and the
Semiconductor Industry Association (SIA).
The event is part of the week’s activities at SEMICON West, the largest exposition of
semiconductor equipment, materials and services in North America, which opens July 14 in San
Francisco, continuing July 16 in San Jose.

“The Fab Managers Forum affords a unique opportunity to learn the latest trends and strategies
for improving semiconductor factory productivity and effectiveness,” said Vicki Hadfield, president
of SEMI North America.
“Dialogue between chipmakers and suppliers is essential to ensure that all participants in the
supply chain benefit from advances in manufacturing technology.”

Representatives from leading IDMs including Intel and Advanced Micro Devices and equipment
suppliers such as Applied Materials, Brook Automation, Canon and Tokyo Electron Ltd will share
their knowledge on strategies and techniques to improve productivity in the wafer fab.

The program is divided into four sessions. The first covers “Mega Trends in Semiconductor
Manufacturing”; Session II focuses on “Strategies for Enhanced Manufacturing Productivity”;
Session III will look at “Issues in Advanced Manufacturing”; and the final session is a panel
discussion on the topic of “Strategies, Challenges and Successes in Factory Automation
Integration.”

Opening remarks for the forum will be given by Kamal Aggarwal, Executive Vice President,
National Semiconductor Corp. He will be followed by keynote speaker, William Siegle, Senior Vice
President and Chief Technologist, Advanced Micro Devices Inc.

SEMI has hosted a similar Fab Managers Forum in Europe for the past several years, held in
conjunction with SEMICON Europa. The success of the European program prompted the
establishment of a similar event for SEMICON West.

The full day forum will be held at National Semiconductor’s facility in Sunnyvale, California,
starting 8.30 a.m.

For more information about the Fab Managers Forum visit the SEMICON West 2003 website at
www.semi.org/semiconwest, or call SEMI Customer Service at 1.408.943.6901. Qualified
journalists wishing to attend the forum must pre-register for media accreditation. Contact
Jennifer Blatt, SEMI Public Relations at 1.408.943.7988 (jblatt@semi.org).

Based in San Jose, Calif., SEMI is an international industry association serving more than 2,500
companies participating in the semiconductor and flat panel display equipment and materials
markets. SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, Seoul, Shanghai,
Singapore, Tokyo and Washington, D.C. For more information, visit SEMI on the Internet
at www.semi.org.

ASSOCIATION CONTACTS: 
Michael Droeger/SEMI
Tel: 1.408.943.6953
E-mail: mdroeger@semi.org
Jonathan Davis/SEMI
Tel: 1.408.943.6937
E-mail: jdavis@semi.org

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「グローバルスタンダードへの挑戦」刊行のお知らせ
−300mm半導体工場のための標準化の歴史−


SEMI(Semiconductor Equipment and Materials International)は、先ごろ、「グローバルスタンダードへの挑戦 −300mm半導体
工場のための標準化の歴史−」を刊行いたしました。
本書は、300mmウェーハの製造を実現するために業界が採用した、標準化による国際分業戦略とその実践の過程を記録したもの
です。本日6月11日(水)より、「SEMIジャパン ON DEMAND LIBRARY」(
www.bookpark.ne.jp/semi/)上で販売を開始いたします。

半導体製造の300mmウェーハへの移行は、業界の生産性を向上させるための必須要素でしたが、これは非常に困難な仕事で
した。半導体産業は、電子デバイスの高集積化、高速化、低コスト化を実現してきていますが、その中心的役割を担っているのは、
絶え間ない研究開発に支えられた微細化とウェーハの大口径化です。

過去にウェーハの大口径化をリードした企業は、その研究開発費のために必ず体力を消耗していました。半導体業界は、次世代
ウェーハ口径への移行に合意し、標準化を優先させることで、個々の企業にかかる負荷を分散するとともに、業界全体として
次世代ウェーハ口径への移行費用を削減する戦略を採りました。

これにより、世界中の半導体デバイスメーカー、製造装置メーカー、材料メーカー、関連団体を巻き込んだグローバルな標準化
活動が7年以上に渡って行われました。

本書には、この標準化活動に携わった諸団体の活動の経緯、戦略や方針、成果、および標準化の背景や経緯が記され、スタン
ダードの理解にも役立つ内容となっています。

活動の過程では、言語・思考過程・習慣の違い、標準化プロセスと標準に対する考え方、特許制度、そして意思決定プロセスの
違いなどが大きな壁となりましたが、それらを乗り越えて相互理解に至るプロセスなしには、国際合意を基本とする標準化は成し
得ませんでした。

本書は、日本企業がグローバル社会で競争力を維持、発展させていく上でも参考にしていただける内容となっています。


「グローバルスタンダードへの挑戦 −300mm半導体工場のための標準化の歴史−」について

◎ 署名: グローバルスタンダードへの挑戦 −300mm半導体工場のための標準化の歴史−
◎ 監修: 小宮 啓義

◎ 発行: SEMIジャパン
◎ 体裁: 四六版・227頁
◎ 価格: 2,500円(税別)
◎ 販売方法:WEBサイト「SEMIジャパン ON DEMAND LIBRARY」(
www.bookpark.ne.jp/semi/)
◎ 目次:
  まえがき <小宮啓義>


  発刊にあたって <内田傳之助>


  第1章 300mm標準化の流れ <小宮啓義>
  1.1 第1回シリコンウェーハサミット
  1.2 第2〜5回シリコンウェーハサミット
  1.3 日本における300mm標準化の流れと国際協力


  第2章 5団体連絡会、J300、J300Eの活動 
  2.1 はじめに <小池淳義>
  2.2 5団体連絡会、J300の活動   <井入正博/徳永謙二>
  2.3 WG内での議論 <児玉祥一>
  2.4 J300からJ300Eへ <本間三智夫>
  2.5 活動まとめ <小池淳義>


  第3章 JEIDA、JEITAの活動 
  3.1 はじめに <垂井康夫>
  3.2 1993年SEMI/JEIDAジョイントテクニカルシンポジウム <垂井康夫>
  3.3 5団体連絡会の設立とJEIDAの対応 <垂井康夫>

  3.4 ウェーハ外形規格の制定と提案 <松下嘉明>
  3.5 ウェーハ端面形状などについての検討と提案 <清水博文>
  3.6 ナノトポグラフィー <福田哲生>
  3.7 まとめ <垂井康夫>


  第4章 SEAJの活動 <林 義宣>
  4.1 はじめに
  4.2 SEAJにおける標準化活動
  4.3 SEAJ 各WGの標準化活動
  4.4 300mmウェーハカセット(キャリア)の標準化
  4.5 まとめ


  第5章 SEMATECH、I300I、ISMTの活動  <P. Gargini/F. Robertson>
  5.1 はじめに
  5.2 初期の300mm移行プログラム
  5.3 SEMATECHの300mm移行プログラム
  5.4 I300Iのスタンダード活動
  5.5 グローバル組織との交流
  5.6 自動化の焦点
  5.7 300mmスタンダードの遺産


  第6章 SEMIの活動
  6.1 はじめに <本間三智夫>
  6.2 他団体とSEMIとの協調 <谷 奈穂子>
  6.3 SEMIでのグローバルスタンダード活動  <Murray Bullis>
  6.4 300mm ウェーハ標準化の歴史 <山道正明>

  6.5 ハードウェア・スタンダード <浅川輝雄>
  6.6 ソフトウェア・スタンダード <坂本見恒>
  6.7 搬送関連ソフトウェア <迎 健一>
  6.8 300mm装置用安全仕様 <井深成仁>
  6.9 300mm標準化活動の有効性検討 <開 俊一>
  6.10 まとめ <本間三智夫>


  第7章 Seleteの活動
  7.1 はじめに <川島憲一>
  7.2 Seleteの標準化、共通化への取り組み <川島憲一>
  7.3 ファブインフラ早期確立への取り組み <徳永謙二>
  7.4 FA/CIM 共通基盤技術の開発     <小林秀/増井知之>
  7.5 ウェーハおよび安全仕様 <宮武久和>
  7.6 まとめ <川島憲一>


  あとがき <小宮啓義>


  付録
  A.1 関係団体リスト
  A.2 用語集
  A.3 関連スタンダードリスト



■SEMIスタンダード活動:
SEMIスタンダードは、世界中の技術者に広く利用されている半導体ならびにフラットパネルディスプレイの製造装置・材料の国際
標準で、現在600を超える国際標準があります。SEMIスタンダードの策定には、世界各地のデバイス、製造装置、材料のメーカー
等の関係者が参加する「SEMIスタンダード委員会」があたっています。



-----------------------------------------------------------------------------------------------
SEMI(Semiconductor Equipment and Materials International)
SEMIは、半導体およびフラットパネルディスプレイ(FPD)関連製造装置・材料産業の国際的な工業会組織として、業界の
健全な発展と国際協調を願って多岐にわたる活動を行っています。

現在、オースティン、サンノゼ、上海、シンガポール、新竹、ソウル、東京、ブリュッセル、北京、ボストン、モスクワ、ワシントン
DCにオフィスがあり、会員企業は約2,500社、この内日本企業は約580社にのぼります。

・SEMI本部:
 3081 Zanker Road, San Jose, CA 95134-2127, U.S.A.
Tel:+1-408-943-6900, Fax:+1-408-428-9600, E-mail:semihq@semi.org, URL:www.semi.org

・SEMI日本事務所:SEMIジャパン  代表 内田 傳之助
 〒102-0074 東京都千代田区九段南4-7-15 健和ビル7F
 Tel:03-3222-5755, Fax:03-3222-5757, E-mail:semijapan@semi.org, URL:www.semi.org/japan

本リリースへのお問合せ
■メディア・コンタクト
  SEMIジャパン マーケティング部
  E-Mail:jpress@semi.org
  Tel: 03-3222-6020、 Fax:03-3222-5757
■本書について
  SEMIジャパン スタンダード部
  E-Mail:jstandards@semi.org
  Tel:03-3222-5993、Fax:03-3222-5790

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SEMICON West 2003 Opens July 14 with Technology Innovation Showcase
Sixteen start-up companies will show novel solutions for IC manufacturing


San Francisco, Calif., June 9, -- The next breakthrough in semiconductor manufacturing may be
among the technologies presented by 16 start-up companies featured in a special one-day
Technology Innovation Showcase at SEMICON West 2003.

The display and presentation forum is designed to highlight for OEMs, IDMs and the financial
community those technologies that demonstrate exceptional promise in meeting the challenges of
next generation semiconductor manufacturing.

“Creativity, innovation and entrepreneurship are thriving regardless of the current state of the
industry economic cycle,” said Stanley T. Myers, president and CEO of SEMI, organizer of the event.
“The TIS will shine a light on new and lesser-known companies developing novel applications to
support the semiconductor manufacturing process.”

The showcase will be held one day only, Monday July 14 in Room 120, Moscone Center, San
Francisco. A series of half hour presentations on each technology will be given, with the first
starting at 10.00 a.m.
Representatives from each organization will be available throughout the day for further discussion. A
separate exhibit area has been set aside so that the participating companies can showcase their
products and solutions.

“The rigorous selection process, involving 100 experts, identified 16 cutting edge products and
processes from more than 70 applicants,” said Warren Moore, chairman of the TIS planning
committee. The finalists include companies from Asia, Europe and the U.S.

To qualify for inclusion in the showcase, the product or process had to be in the advanced
development stage, but not yet in commercial production.
Technology areas covered include e-manufacturing, cleaning, new materials and metrology. Specific
solutions presented will range from mobile wireless wafer fab management applications to atomic
scale surface cleaning of wafers.

Many of the companies participating in TIS were established by engineers working in industries
other than semiconductors, including aerospace and optoelectronics. With this insight and
application experience from other sectors, the participants bring a new perspective to problems
faced by semiconductor manufacturers.

“These are the companies that didn’t know it couldn’t be done,” said Terry Francis, a member of
the TIS selection committee. “The entrepreneurs behind these innovations don’t have our biases,
our prejudices. They look at things in a new way,”

Admission to the Technology Innovation Showcase is complimentary for registered SEMICON West
2003 visitors and exhibitors.

Based in San Jose, Calif., SEMI is an international industry association serving more than 2,500
companies participating in the semiconductor and flat panel display equipment and materials markets.
SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, Seoul, Shanghai, Singapore,
Tokyo and Washington, D.C. For more information, visit SEMI on the Internet at www.semi.org.
ASSOCIATION CONTACTS: 
Michael Droeger/SEMI
Tel: 1.408.943.6953
E-mail: mdroeger@semi.org
Jonathan Davis/SEMI
Tel: 1.408.943.6937
E-mail: jdavis@semi.org
# # #

(Editor's Note: Following is a list of participating companies and the
presentation schedule for the Technology Innovation Showcase).


Technology Innovation Showcase - Schedule and Participants
Monday, July 14, 10:00 a.m.- 6:00 p.m.
Room 120, Moscone Center, San Francisco

Presentation Schedule

10:00am - 10:30am Cyberfab
Bluefab mobile wireless e-manufacturing PDA communication platform for fabs

10:30am - 11:00am Ahsoon Technologies, Inc.
Intelliprom TM /APC process control software

11:00am - 11:30am Speedworks Software
Automated image analysis

11:30am - 12:00pm Technic, Inc.
Cerberus insitu sensor for process control of copper metalization

12:00pm - 12:30pm SemEquip, Inc.
Cluster beam ion source

12:30pm - 1:00pm Micro Encoder, Inc.
Absolute, 2-dimensional/rotational, sub-nanometer position sensor

1:00pm - 1:30pm Vertical Solutions
Universal Load Port Buffer (ULPB)

1:30pm - 2:00pm Actinix
PMT-193/PMT-157, photomask metrology tools

2:00pm - 2:30pm Imago Scientific Instruments
LEAP 3-D Atom Probe Microscope, 3D analytical technique
structure and composition

2:30pm - 3:00pm Renishaw plc
Structure and chemical analyzer for SEM

3:00pm - 3:30pm Technos Co. Ltd.
Pore size distribution measurement in low k dielectrics

3:30pm - 4:00pm MultiMetrixs
RST, sensor thin film measurement technique

4:00pm - 4:30pm Quad Associated Products
Franhaufer LA wave instrument for thin film properties

4:30pm - 5:00pm MetaStable Instruments
Laser cleaning via attenuated total internal reflection

5:00pm - 5:30pm Phasor Scientific, Inc.
Microcluster precision cleaning method

5:30pm - 6:00pm Paul Castrucci & Associates
Super critical yield enhancement tool

Admission is complimentary.
For additional information, please call 408.943.6981


↑TOP


SEMI Publishes 13 New Standards Related to Semiconductor, FPD Manufacturing
Common Specifications Contribute to Lower Costs, Faster Time to Market


San Jose, Calif., June 2, 2003 ‐ SEMI today announced the publication of 13 new technical
standards relating to important aspects of semiconductor and flat panel display manufacturing.
The new standards, developed by industry experts from equipment suppliers, device manufacturers
and other companies participating in the SEMI International Standards Program, are available for
purchase in CD-ROM format or can be downloaded from the SEMI website, www.semi.org.

SEMI Standards are published three times a year. The 13 new standards, part of the July 2003
(0703) publication cycle, join more than 620 standards that have been published by SEMI during
the past 30 years.

Included in the new standards are best practices for welding of fluid distribution systems in wafer
fabs, provisional specifications for XML message structures, guidelines for calculating overall factory
efficiency (OFE) and measurement methods for optical characteristics of flat panel display backlight
units.

“Standards are critical for reducing costs, speeding time to market and spurring development of
new markets and technologies,” said Bruce Gehman, vice president, standards and chief technology
officer, SEMI. “We are pleased to be able to introduce these 13 new specifications that will provide
further cost savings and economies of scale for the semiconductor and flat panel display
manufacturing industries.”

 The standards released today include:

 ・ SEMI D33-0703 ‐ Measuring Method of Optical Characteristics for Backlight Unit
 ・ SEMI D34-0703 ‐ Test Method for Measurement of FPD Polarizing Films
 ・ SEMI E122.1-0703 ‐ Specification for SECS-II Protocol for Tester Specific Equipment Model
              (TSEM)
 ・ SEMI E123.1-0703 ‐ Specification for SECS-II Protocol for Handler Specific Equipment Model
              (HSEM)
 ・ SEMI E124-0703 ‐ Provisional Guideline for Definition and Calculation of Overall Factory
             Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics
 ・ SEMI E125-0703 ‐ Provisional Specification for Equipment Self Description (ESD)
 ・ SEMI E126-0703 ‐ Provisional Specification for Equipment Quality Information Parameters
              (EQIP)
 ・ SEMI E127-0703 ‐ Specification for Integrated Measurement Module Communications:
                Concepts, Behavior, and Services (IMMC) Table of Contents
 ・ SEMI E128-0703 ‐ Provisional Specification for XML Message Structures
 ・ SEMI F77-0703 ‐ Test Method for Electrochemical Critical Pitting Temperature
              Testing of Alloy Surfaces Used in Corrosive Gas Systems
 ・ SEMI F78-0703 ‐ Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution
              Systems in Semiconductor Manufacturing Applications
 ・ SEMI F79-0703 ‐ Guideline for Gas Compatibility with Silicon Used in Gas Distribution
              Components
 ・ SEMI M23.6-0703 ‐ Specification for Round 150 mm Polished Monocrystalline Indium
               Phosphide Wafers (notched)

About SEMI Standards:
The SEMI Standards Program, established in 1973, covers all aspects of semiconductor process
equipment and materials, from wafer manufacturing to test, assembly and packaging, in addition to
the manufacture of flat panel displays and micro-electromechanical systems (MEMS).
Approximately 2,900 volunteers worldwide participate in the program, which is made up of 17
global technical committees.
Visit www.semi.org/standards for further details about SEMI Standards.

About SEMI:
Based in San Jose, Calif., SEMI is an international industry association serving more than 2,500
companies participating in the semiconductor and flat panel display equipment and materials
markets. SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, Seoul, Shanghai,
Singapore, Tokyo and Washington, D.C.
For more information, visit www.semi.org

ASSOCIATION CONTACTS: 
Michael Droeger/SEMI
Tel: 1.408.943.6953
E-mail: mdroeger@semi.org
Jonathan Davis/SEMI
Tel: 1.408.943.6937
E-mail: jdavis@semi.org
(Editor's Note: Following is more detailed information on a select number of the
new standards published today by SEMI).


SEMI F78-0703
Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor
Manufacturing Applications

The F78-0703 practice for gas tungsten arc (GTA) welding of fluid distribution systems is intended
to provide a single source for a welding standard applicable to the precise and contamination-free
welds necessary for semiconductor manufacturing applications. GTA automatic welding is widely
used as a construction method for semiconductor manufacturing equipment, fluid distribution
system components, and in wafer fabs. Due to the lack of a uniform standard, many end users had
developed internal specifications for this process.

“SEMI F78-0703 provides a proven procedure for GTA automatic welds that will meet the purity
standards of the industry,” said Sunniva R. Collins, research metallurgist at Swagelok. “This
standardization should eliminate confusion, misunderstanding, and quality inspection discrepancies,”
added Ed Wolf, Swagelok training specialist.

SEMI E124-0703
Provisional Guideline for Definition and Calculation of Overall Factory Efficiency (OFE) and Other
Associated Factory-Level Productivity Metrics

This standard relates to the efficiency of the entire factory and offers a method of
conceptualizing and measuring the efficiency of a complex manufacturing process.
In addition to measuring overall factory efficiency, the standard also defines several other key
industry metrics such as throughput, cycle time and work-in-progress.

SEMI E125-0703
Provisional Specification for Equipment Self Description (ESD)

The E125-0703 standard makes it possible to discover what data, events, exceptions, and objects
are available for data acquisition from each component of the equipment, thus providing more up to
date software to engineers and significantly reducing the level of paper documentation from
suppliers.

“The specification can help realize cost savings by enabling improved efficiency in the process of
integrating equipment data into engineering and other manufacturing applications,” said James W.
Martin, system software engineer, Intel Corp.

The specification is the second (following E120, the Common Equipment Model) in a suite of four
standards from SEMI focused on improving the total data throughput from the equipment
independently of the GEM interface. The development of this specification is a key enabler to
achieving future fault detection and classification (FDC), run-to-run control, e-diagnostics, and
Overall Equipment Efficiency (OEE) goals in manufacturing.

SEMI E127-0703
Specification for Integrated Measurement Module Communications

E127-0703 provides a standard interface for integrated measurement used in the inspection and
metrology process. Integrated measurement eliminates the time and expense of taking wafers to a
stand-alone tool for measurements. “Having a standard interface will lower the cost and shorten the
time required to add a measurement module provided by a third party supplier to a tool,” said
Margaret Pratt, a consultant with Margaret Pratt Consultants.

Without this new standard tool suppliers were forced to write new programming code in order to
introduce a new measurement process into a tool. As such, E127 will greatly reduce both cost and
time involved in integration.

SEMI E128-0703
Provisional Specification for XML Message Structures

E128-0703 is intended to achieve interoperability between semiconductor manufacturing software.
Standard XML message structures will enable software developed by independent suppliers to be
exchanged using commercial tools for message creation and parsing.

“The XML messaging standard provides the basis for open communication in next generation
software applications much the way SECS-II has supported the current software implementations,
” said Bob Hodges, senior staff member -- technical, at Texas Instruments Inc.

The XML message structures specified in this standard will reduce cost to suppliers through the
use of software technologies being applied in many industries. It will allow semiconductor
manufacturing suppliers and users to leverage tools and experience from a broad base rather than
defining a parochial standard used only in the semiconductor industry.

SEMI D33-0703
Measuring Method of Optical Characteristics for Backlight Unit

The new standard relating to FPD backlight units provides a unified means of testing optical
characteristics of the backlight unit used in LCDs. Prior to the introduction of this standard, each
company employed its own method of testing for factors such as measurement distance and
position, the number of measuring points, luminance stable time and uniformity formula.

Applying this standard will help reduce the cost and time taken for the inspection process.
“This standard will allow the backlight unit manufacturer and the panel maker achieve cost savings
and economic benefits,” said Lee Don Gyou, associate research engineer, LG.Philips LCD.

SEMI D34-0703
Test Method for Measurement of FPD Polarizing Films

The second FPD-related standard covers test methods for measurement of polarizing films used
in TFT LCD manufacturing. It establishes implementation guidelines for the measurement of visual
appearance, thickness and optical characteristics of polarizing films.

Adoption of this standard will contribute to cost savings by reducing the number of size variations of
polarizing film by implementing a common measurement method.
“The methods described in this standard can be applied in manufacturing, quality control and
research and development,” said Iwasaki Takehiko, Chief Engineer, Manufacturing Section 3,
Optical Related Product Sector, Nitto Denko Corp.

SEMI E126-0703
Provisional Specification for Equipment Quality Information Parameters (EQIP)

As the industry moves to smaller geometries and larger wafers, Run-to-Run (R2R) control
(also known as Advanced Process Control) is becoming a required component to achieve
acceptable yield and throughput. R2R control is a form of discrete process control in which the
process is adjusted between “runs” so as to achieve process targets. A key impediment to its
implementation has been the lack of a standard mechanism to allow the integration of automated
R2R control into the equipment.

“With this standard in place, users now have a way to guarantee that the equipment they purchase
is enabled for R2R control,” said James Moyne, director of advanced process control technology at
Brooks Automation. “This will allow for faster specification deployment of R2R control, which will
lead to faster ramp-up times, and improved process capabilities.”


↑TOP


SEMICON West 2003 Set for July 14-18 in San Francisco and San Jose
Premier Annual Semiconductor Event Adds MEMS Exhibit and New Technical Programs

SAN JOSE, Calif., May 20, 2003 -- The 2003 edition of SEMICON West, the gateway to the global
supply chain for semiconductor and related microelectronics manufacturing, is set to open July 14
in San Francisco, continuing July 16 in San Jose.

The expo is the world’s largest devoted to manufacturing technologies for semiconductors, flat
panel displays, MEMS and related microelectronics industries. 
This year it will include several new exhibits and programs designed to broaden the exposition
experience for visitors and facilitate increased information exchange between suppliers and users.

The 33rd annual SEMICON West opens at the Moscone Center with the Wafer Processing segment
July 14-16, and continues at the San Jose Convention Center with the Final Manufacturing
segment, July 16-18. SEMICON West 2003 is presented by Semiconductor Equipment and Materials
International (SEMI). 

This year’s exposition will feature more than 1,400 exhibiting companies from around the world
occupying more than 334,307 net square feet of exhibit space,  showcasing the latest developments
in semiconductor and related equipment, materials, services and technology. Last year, more than
60,000 people registered for the week-long show, making it one of the largest trade expositions in
Silicon Valley.

“SEMICON West affords a unique opportunity for access to industry experts on all aspects of chip
making,” said Vicki Hadfield, president of SEMI North America. “As the venue for the world’s most
comprehensive array of semiconductor manufacturing tools and processes, SEMICON West serves
as the gateway to the global supply chain.”

This year’s exposition features a number of new events designed to facilitate increased interaction
and deliver critical trend information that will define the future semiconductor and related
technologies landscape. 

Some of the new programs include: 
      Technology Innovation Showcase, Monday July 14, at Moscone Center; where
      representatives from 20 innovative companies will present products and
      concepts for the future. 
      MEMS Pavilion, Monday July 14 to Wednesday July 16, Esplanade Hall, Moscone
      Center; a showcase of the latest technologies and tools dedicated to MEMS. 
      This event is co-sponsored by the MEMS Industry Group and MANCEF, the Micro
      and Nanotechnology Commercialization Education Foundation.
      Lithography programs, held July 14 and July 15, covering key business and
      technical issues for engineers, technology managers and technicians. These 
      events are co-sponsored by SPIE, the International Society for Optical 
      Engineering.                                                                  
      Fab Managers Forum, Thursday, July 17, held at National Semiconductor Corp. in
      Sunnyvale, Calif. where managers from the wafer fab and supplier community    
      will gather to discuss ways to increase overall productivity.                 
                                                                                    
For more information about SEMICON West 2003, including exhibits-only and paid program
registration, visit the SEMICON West 2003 website at www.semi.org/semiconwest, or call SEMI
Customer Service at 1.408.943.6901.         
Qualified journalists wishing to attend SEMICON West 2003 must pre-register for media accreditation.
Contact Jennifer Blatt, SEMI Public Relations at 1.408.943.7988 (jblatt@semi.org). 

Based in San Jose, Calif., SEMI is an international industry association serving more than 2,500
companies participating in the semiconductor and flat panel display equipment and materials markets.
SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, Seoul, Shanghai, Singapore,
Tokyo and Washington, D.C. For more information, visit SEMI on the Internet at www.semi.org

ASSOCIATION CONTACTS: 
Michael Droeger/SEMI
Tel: 1.408.943.6953
E-mail: mdroeger@semi.org
Jonathan Davis/SEMI
Tel: 1.408.943.6937
E-mail: jdavis@semi.org
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 (Editor's Note: The following a schedule of media events and programs presented at 
 SEMICON West.)                                                                     
                                                                                    
 EXPOSITION HOURS                                                                   
 WAFER PROCESSING -- SAN FRANCISCO MOSCONE CENTER                                   
                                                                                    
 Monday, July 14 10:00 a.m.-6:00 p.m.                                               
 Tuesday, July 15 10:00 a.m.-6:00 p.m.                                              
 Wednesday, July 16 10:00 a.m.-4:00 p.m.                                            
                                                                                    
 TEST, ASSEMBLY AND PACKAGING -- SAN JOSE CONVENTION CENTER 
                                                                                    
 Wednesday, July 16 10:00 a.m.-6:00 p.m.                                            
 Thursday, July 17 10:00 a.m.-6:00 p.m.                                             
 Friday, July 18 10:00 a.m.-4:00 p.m.                                               
                                                                                    
                                                                                    
 PRESS ROOM HOURS/LOCATIONS                                                         
                                                                                    
 SAN FRANCISCO: Moscone Center, Room 300, South Hall, Esplanade Level               
                                                                                    
 Sunday, July 13 1:00 p.m.-4:00 p.m.                                                
 Monday, July 14 9:00 a.m.-6:00 p.m.                                                
 Tuesday, July 15 9:00 a.m.-6:00 p.m.                                               
 Wednesday, July 16 9:00 a.m.-4:00 p.m.                                             
                                                                                    
 SAN JOSE: San Jose Convention Center, Room K, McEnery Hall, Street Level           
                                                                                    
 Tuesday, July 15 1:00 p.m.-4:00 p.m.                                               
 Wednesday, July 16 9:00 a.m.-6:00 p.m.                                             
 Thursday, July 17 9:00 a.m.-6:00 p.m.                                              
 Friday, July 18 9:00 a.m.-4:00 p.m.                                                
                                                                                    
                                                                                    
 SEMICON WEST 2003 PRESS CONFERENCES                                                
                                                                                    
 WAFER PROCESSING -- SAN FRANCISCO MOSCONE CENTER                                   
 Moscone Center, Room 113 (Lower North, Hall Lobby)                                 
 (Signed as "SEMI Press Conference Room")                                           
                                                                                    
 Monday, July 14                                                                    
                                                                                    
                                                                                    
 10:30 - 12:00 SEMI - SEMICON West Press Conference                                 
                                                                                    
 TEST, ASSEMBLY AND PACKAGING -- SAN JOSE CONVENTION CENTER                         
 San Jose Convention Center, Room L (Street Level)                                  
 (Signed as "SEMI Press Conference Room")                                           
                                                                                    
 Wednesday, July 16                                                                 
                                                                                    
                                                                                    
 10:30 - 12:00 SEMI - SEMICON West Press Conference                                 
 14:00 - 14:45 Advantest                                                            
                                                                                    
                                                                                    
                              SEMI Technical Symposium                              
                       Location: San Francisco Marriott Hotel                       
                                                                                    
                                                                                    
                                                                                    
 Monday, July 14                                                                    
 9:00 am - 12:00 pm ISM Session 101: EHS Part 1 Addressing Emerging EHS Challenges  
 9:00 am - 12:00 pm ISM Session 102: CFM Part 1 Contamination Reduction             
 Methodologies and Advances in Fluid Delivery                                       
 2:00 pm - 5:00 pm ISM Session 103: EHS Part 2 Implementation of Current EHS        
 Solutions                                                                          
 2:00 pm - 5:00 pm ISM Session 104: CFM Part 2 Advanced Wafer Cleaning and Surface  
 Preparation                                                                        
                                                                                    
 Tuesday, July 15                                                                   
 9:00 am - 12:00 pm ISM Session 105: Integrating Process and Equipment Control in   
 the 300 mm Factory                                                                 
 9:00 am - 12:00 pm ISM Session 106: Advances in Trace Gas Analysis                 
 9:00 am - 12:00 pm ISM Session 107: Future Device Technologies                     
 2:00 pm - 5:00 pm ISM Session 108: Material Handling in the Fully Automated 300 mm 
 Facility                                                                           
 2:00 pm - 5:00 pm ISM Session 109: Analytical Techniques for In Situ Process       
 Monitoring                                                                         
 2:00 pm - 5:00 pm ISM Session 110: Advanced Processing For MEMS, MRAM and          
 Semiconductor                                                                      
                                                                                    
 Wednesday, July 16                                                                 
 9:00 am - 12:00 pm ISM Session 111: Chemical Mechanical Planarization Technology   
 9:00 am - 12:00 pm ISM Session 112: Infrastructure for Advanced Lithography        
 9:00 am - 12:00 pm ISM Session 113: Current Interconnect Process Control and       
 Challenges                                                                         
                                                                                    
                       Equipment and Materials Market Briefing                      
                                  Location: Moscone                                 
                                                                                    
 Tuesday, July 15                                                                   
 8:30 am - 12:00 pm Equipment and Materials Market Briefing                         
                                                                                    
                              SEMI Technical Symposium                              
                          Location: San Jose Marriott Hotel                         
                                                                                    
 Wednesday, July 16                      &nb